HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

• Cooling capacities: 8kW
• Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
• Temperature range setting: -20 to 40°C
• Temperature stability: ±0.1°C
• Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
• Standards: CE, UL, RoHS, SEMI S2, S8, F47

Product Catalog

SERIES CATALOG